Modeling the topographic lateral resolution of interferometers
Resource type
Authors/contributors
- Groot, P. J. de (Author)
- Kramer, J. W. (Author)
- Sutherland, T. P. (Author)
Title
Modeling the topographic lateral resolution of interferometers
Abstract
Performance characteristics for interferometers that measure surface topography include the ability to resolve closely spaced surface features, referred to as topographic spatial resolution. Within well-defined limits, scalar diffraction theory and classical Fourier optics provide a software model for prediction of the resolution and spatial frequency response for interference phase-based measurements of surface topography. Analytical solutions and adaptive sampling allow for rapid simulation of both the nominal linear transfer function and an estimate of intrinsic residual nonlinearities.
Proceedings Title
Modeling Aspects in Optical Metrology IX
Conference Name
Modeling Aspects in Optical Metrology IX
Publisher
SPIE
Date
2023/08/10
Volume
12619
Pages
177-194
Citation Key
grootModelingTopographicLateral2023
Accessed
10/12/23, 12:05 PM
Library Catalog
Extra
0 citations (Crossref) [2023-10-31]
Citation
Groot, P. J. de, Kramer, J. W., & Sutherland, T. P. (2023). Modeling the topographic lateral resolution of interferometers. Modeling Aspects in Optical Metrology IX, 12619, 177–194. https://doi.org/10.1117/12.2670939
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